Presenting the very recent results on an innovative z-axis MEMS capacitive accelerometer with in-plane differential readout at the IEEE MEMS2023 in Munich.
The work has been carried out within the joint research center STMicroelectronics and Politecnico di Milano.
Thanks a lot to my co-authors Gabriele Gattere, Manuel Riani, Francesco Rizzini and Attilio Frangi.
[1] V. Zega, G. Gattere, M. Riani, F. Rizzini, A. Frangi ‘High sensitivity MEMS z-axis accelerometer with in-plane differential readout’ IEEE MEMS 2023, Monaco, Germany, January 15-19, 2023