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________________________________________________________________________________________________________________________________________________**PHD THESIS**

[0] V. Zega ‘MEMS sensors for the measurement of the angular velocity: mechanical and structural issues’, 2017.

________________________________________________________________________________________________________________________________________________**PUBLICATIONS IN PEER REVIEWED JOURNALS **

[1] V. Zega, C. Comi, A. Corigliano, C. Valzasina ‘*Integrated structure for a resonant micro-gyroscope and accelerometer*‘ Frattura e integrità strutturale, 29 (2014) 334-342

[2] Caspani, C. Comi, A. Corigliano, G. Langfelder, V. Zega and S. Zerbini ‘*A differential resonant micro accelerometer for out-of-plane measuremens*’ Procedia Engineering, 87 (2014) 640-643

[3] Caspani, C. Comi, A. Corigliano, G. Langfelder, V. Zega and S. Zerbini ‘*Dynamic nonlinear behaviour of torsional resonators in MEMS*’ Journal of Micromechanics and Microengineering, 24 (2014) 095025

[4] S. H. Nitzan, V. Zega, M. Li, C. H. Ahn, A. Corigliano, T. W. Kenny, D. A. Horsley ‘*Self-induced parametric amplification arising from nonlinear elastic coupling in a micromechanical resonating disk gyroscope*’ Scientific Reports 5 (2015)

[5] V. Zega, S. H. Nitzan, M. Li,C. H. Ahn,E. Ng, V. Hong,Y. Yang T. Kenny, A. Corigliano, and D. A. Horsley *‘Predicting the closed-loop stability and oscillation amplitude of nonlinear parametrically amplified oscillators*’ Applied Physics Letters 106, 233111 (2015) doi: 10.1063/1.4922533

[6] C. Comi, A. Corigliano, M. Doti, A. Garatti, G. Langfelder, V. Zega ‘*Torsional microresonator in the nonlinear regime: experimental, numerical and analytical characterization*’ Procedia Engineering, 168 (2016), 933-936

[7] C. Comi, A. Corigliano, G. Langfelder, V. Zega, S. Zerbini ‘*Sensitivity and temperature behaviour of a novel zaxis differential resonant micro accelerometer*’ Journal of Micromechanics and Microengineering 26 (2016) 1-11

[8] C. Comi, A. Corigliano, V. Zega and S. Zerbini ‘*Non linear response and optimization of a new z-axis resonant micro-accelerometer*’ Mechatronics 40 (2016) 235-243

[9] M. Bruggi, V. Zega and A. Corigliano ‘*Synthesis of auxetic structures using optimization of compliant mechanisms and a micropolar material model*’ Structural and Multidisciplinary Optimization 55 (2017) 1-12

[10] V. Zega , C. Credi, R. Bernasconi, G. Langfelder, L. Magagnin, M. Levi and A. Corigliano ‘*The first 3D-printed z-axis accelerometers with differential capacitive sensing*’ IEEE Sensors Journal 18 (2018) 53- 60

[11] P. Minotti, S. Dellea, G. Mussi, A. Bonfanti, S. Facchinetti, A. Tocchio, V. Zega, C. Comi, A. Lacaita, G. Langfelder ‘*High scale-factor stability frequency-modulated MEMS gyroscope: 3-axis sensor and integrated electronics design*’ IEEE Transaction on Industrial Electronics, 65(6) (2018) 5040-5050

[12] L. D’Alessandro, V. Zega, R. Ardito, A. Corigliano ‘*3D auxetic single material periodic structure with ultrawide tunable bandgap*’ Scientific Reports 8:2262 (2018)

[13] V. Zega, C. Comi, P. Minotti, G. Langfelder, L. Falorni, A. Corigliano ‘*A new MEMS three-axial frequencymodulated (FM) gyroscope: a mechanical perspective*’ European Journal of Mechanics/A Solids, 70 (2018) 203-212.

[14] J. Zhang, Y. Wang, V. Zega, Y. Su, A. Corigliano ‘*Nonlinear dynamics under varying temperature conditions of the resonating beams of a differential resonant accelerometer*’ Journal of Micromechanics and Microengineering, 28 (2018) 075004.

[15] V. Zega, A. Frangi, A. Guercilena, G. Gattere ‘*Analysis of frequency stability and thermoelastic effects for slotted tuning fork MEMS resonators*’ MDPI Sensors, 18(7) (2018) 2157.

[16] V. Zega, G. Langfelder, L.G. Falorni, C. Comi ‘*Hardening, softening and linear behavior of elastic beams in MEMS: an analytical approach*’ J. Microelectromech. Syst., 28(2) (2019) 189-198.

[17] V. Zega, A. Nastro, M. Ferrari, R. Ardito, V. Ferrari, A. Corigliano ‘*Design, fabrication and experimental validation of a MEMS periodic auxetic structure*’ Smart Mater. Struct., 28 (2019) 095011.

[18] V. Zega, M. Invernizzi, R. Bernasconi, F. Cuneo, G. Langfelder, L. Magagnin, M. Levi, A. Corigliano ‘*The first 3D-printed and wet-metallized three-axis accelerometer with differential capacitive sensing*’ IEEE Sensors Journal, 19 (20) (2019) 9131-9138.

[19] G. Mussi, M. Bestetti, V. Zega, A. Frangi, G. Gattere, G. Langfelder ‘*An Outlook on potentialities and limits in using epitaxial polysilicon for MEMS realt-time clocks*’ IEEE Transaction on Industrial Electronics, 67(8) (2020) 6996-7004.

[20] C. Comi, V. Zega, A. Corigliano, ‘*Non-linear mechanics in resonant inertial micro sensors*’ Int. J. Nonlinear Mech. 120 (2020) 103386.

[21] L. Gaffuri Pagani, P. Carulli, V. Zega, R. Suriano, R. Bernasconi, A. Frangi, M. Levi, L. Magagnin, G. Langfelder ‘*The First Three-Dimensional Printed and Wet-Metallized Coriolis Mass Flowmeter*’ IEEE Sensors Lett. 4 (6) (2020) 2500604.

[22] Z. Yao, R. Zhao, V. Zega, A. Corigliano, ‘*A metaplate for complete 3D vibration isolation*’, European J. Solid Mech. A/Solids, 84, (2020) 104016.

[23] V. Zega, P. B. Silva, M. G. D. Geers, V. G. Kouznetsova ‘*Experimental proof of emergent subharmonic attenuation zones in a nonlinear locally resonant metamaterial*’ Scientific Reports, 10 (1), (2020) 12041.

[24] Z. Yao, V. Zega, Y. Su, J. Ren, J. Zhang, A. Corigliano ‘*Design, fabrication and experimental validation of a metaplate for vibration isolation in MEMS*’ J. Microelectromech. Syst., 29(5), (2020), 1401-1410.

[25] V. Zega, G. Gattere, S. Koppaka, A. Alter, G.D. Vukasin, A. Frangi, T.W. Kenny ‘*Numerical modelling of Non-Linearities in MEMS resonators*’ J. Microelectromech. Syst., 26(6), (2020), 1443-1453.

[26] L. Pertoldi, V. Zega, C. Comi, R. Osellame ‘*Dynamic mechanical characterization of two-photon-polymerized SZ2080 photoresist*’ J. Applied Physics, 128, (2020), 175102.

[27] V. Zega, L. Martinelli, R. Casati, E. Zappa, G. Langfelder, A. Cigada, A. Corigliano ‘*A 3D Printed Ti6Al4V Alloy Uniaxial Capacitive Accelerometer*‘ IEEE Sensors Journal, 21 (18), (2021) 19640–19646.

[28] G. Gobat, V. Zega, P. Fedeli, L. Guerinoni, C. Touzé, A. Frangi ‘*Reduced order modelling and experimental validation of a MEMS gyroscope test-structure exhibiting 1:2 internal resonance’ *Scientific Reports, 11 (1), (2021), 16390.

[29] V. Zega, L. Pertoldi, T. Zandrini, R. Osellame, C. Comi, A. Corigliano ‘*Microstructured phononic crystal isolates from ultrasonic mechanical vibrations*‘ Appl. Science 12 (2022) 2499.

[30] M. Antonacci, E. Riva, A. Frangi, A. Corigliano, V. Zega ‘*Planar GRIN lenses: numerical modelling and experimental validation’ *J. Sound and Vibr. 537 (2022) 117217.

[31] E. Panahi, A. Hosseinkhani, A. Frangi, D. Younesian, V. Zega ‘*A novel low-frequency multi-bandgaps metaplate: Genetic algorithm based optimization and experimental validation’ *Mech. Syst. Signal Processing 181, (2022) 109495.

[32] A. Annessi,V. Zega, P. Chiariotti, M. Martarelli, P. Castellini ‘*An innovative metastructure for vibration sensorshandling: numerical modelling and experiments*’ J. Applied Physics132, (2022) 084903.

[33] R. Bernasconi, D. Hatami, H. Nouri Hosseinabadi, V.Zega, A. Corigliano, R. Suriano, M. Levi, G. Langfelder,L. Magagnin ‘*Hybrid Additive Manufacturing of a Piezopolymer-Based Inertial Sensor*’ Additive Manufacturing 59, (2022) 103091.

[34] D. Faraci, V. Zega, A. Nastro, C. Comi ‘*Identification of MEMS Geometric Uncertainties through Homogenization*’, Micro 2, (2022) 564-574.

[35] G. Gobat, V. Zega, P. Fedeli, C. Touzé, A. Frangi ‘*Frequency combs in a MEMS resonator featuring 1:2 internalresonance: ab-initio reduced order modelling and experimental validation*’ Nonlinear Dynamics 111, (2023) 2991–3017.

[36] C. Galimberti, G. Gattere, M. Riani, V. Zega ‘*A new design strategy for innovative MEMS xz-biaxial accelerometer*’ IEEE Sensors Letters 7 (10), (2023) 2503504.

[37] V. Zega, C. Gazzola, A. Buffoli, L. G. Falorni, G. Langfelder, A. Frangi ‘*A defect-based MEMS phononic crystal slab waveguide in electronic circuits*’ J. Microelectromech. Syst. 32(5), (2023) 494-504.

[38] C. Gazzola, V. Zega, F. Cerini, S. Adorno, A. Corigliano ‘*On the design and modelling of a full-range piezoelectric MEMS loudspeaker for in-ear applications*’ J. Microelectromech. Syst. (in press)

[39] R. Nastri, C. Padovani, V. Zega, L. G. Falorni, G. Langfelder ‘*Low-amplitude operation of Lissajous frequency modulated MEMS gyroscopes for spurious harmonics reduction*’ IEEE Sensors Letters 7(11), (2023) 2504104.

[40] P. Frigerio, A. Fagnani, V. Zega, G. Gattere, G. Langfelder ‘*Epitaxial polysilicon MEMS temperature sensor with 50-mK resolution at 4-Hz data rate*’ IEEE Sensors Journal (under review)

[41] M. De Pace, P. Frigerio, C. Valzasina, L. G. Falorni, P. Peliti, V. Zega, G. Langfelder ‘*Split is not dead: a case study (and review) of the performance gap between MEMS automotive-grade gyroscopes and high-end applications*’ IEEE Sensors Letters, 7(12), (2023), 2504904.

[42] C. Gazzola, V. Zega, A. Corigliano, M. Melon, P. Lotton ‘*A reduced-order-model-based equivalent circuit for piezoelectric MEMS loudspeaker modeling*’ J. Acoust. Soc. Am. (under review)

________________________________________________________________________________________________________________________________________________**CHAPTER IN A BOOK**

[1] A. Corigliano, A. Ghisi, S. Mariani, V. Zega ‘*Mechanics of Microsystems: a recent journey in a fascinating branch of mechanics*’ in G. Rega(eds) 50+ Years of AIMETA. Springer, Cham. (2022) 419-435.

[2] C. Comi, A. Corigliano, A. Frangi, V. Zega ‘*Linear and Nonlinear Mechanics in MEMS*’ in B. Vigna, P. Ferrari, F.F. Villa, E. Lasalandra, S. Zerbini (eds) Silicon Sensors and Actuators. Springer, Cham (2022) 389-437.

________________________________________________________________________________________________________________________________________________**PUBLICATIONS IN NON-PEER REVIEWED JOURNALS**

[1] P. B. Silva, T. van Nuland, T. S. van Loon, V. Zega, M. J. Leamy, M. G. D. Geers, V. G. Kouznetsova ‘* Acoustic metamaterials: metamaterials for wave control and manipulation by exploring nonlinearities*’ in Innovative Materials, 4 (2018) 30-35.

________________________________________________________________________________________________________________________________________________

**INTERNATIONAL CONFERENCES CONTRIBUTIONS (PRESENTED)**

[1] C. Comi, A. Corigliano, M. Doti, A. Garatti, G. Langfelder, V. Zega ‘

*Torsional microresonator in the nonlinear regime: experimental, numerical and analytical characterization*’ Eurosensors16, Budapest, Hungary, September 4-7, 2016.

[2] C. Credi, V. Zega, R. Bernasconi, G. Langfelder, A. Cigada, L. Magagnin, M. Levi, A. Corigliano ‘

*Design, fabrication and testing of the first 3D-printed and wet metallized z-axis accelerometer’*Proceedings, 1, 614, doi:10.3390/proceedings1040614 (2017) 1-5.

[3] V. Zega, P. Minotti, G. Mussi, A. Tocchio, L. Falorni, S. Facchinetti, A. Bonfanti, A.L. Lacaita, C. Comi, G. Langfelder, A. Corigliano ‘

*The first frequency-modulated (FM) pitch gyroscope*’ Proceedings, 1, 393, doi:10.3390/proceedings1040393 (2017) 1-5.

[4] V. Zega, M. Bruggi, A. Corigliano ‘

*’ IV ECCOMAS young investigator conference, Milan, Italy, September 13-15, 2017.*

**Optimization of auxetic structures**[5] V. Zega, C. Comi, P. Fedeli, A. Frangi, A. Corigliano, P. Minotti, G. Langfelder, L. Falorni, A. Tocchio ‘

*A dual-mass frequency-modulated (FM) pitch gyroscope: mechanical design and modelling*’ Inertial ’18, Lake Como, Italy, March 26-29, 2018.

[6] V. Zega, A. Frangi, A. Guercilena, G. Gattere ‘

*’ ESMC 2018, Bologna, Italy, July 2-6, 2018.*

**Numerical modelling of MEMS resonators**[7] V. Zega, C. Comi, G. Langfelder, L. Falorni ‘

*’ ESMC 2018, Bologna, Italy, July 2-6, 2018.*

**A strategy to widen the linear range of elastic micro-springs**[8] V. Zega, P. B. Silva, V. Kouznetsova, M. G. D. Geers ‘

*’ Engineering Mechanics (EM) Symposium 2018, Arnhem, the Netherlands, October 23-24, 2018.*

**Towards an emergent metamaterial design**[9] V. Zega, A. Frangi, G. Gattere ‘

*’ IcoNsoM 2019, Rome, Italy, June 16-19, 2019.*

**Numerical modelling of nonlinearities in MEMS resonators for real-time clocks**[10] V. Zega, P. B. Silva, V. G. Kouznetsova, M. G. D. Geers ‘

*’ IcoNsoM 2019, Rome, Italy, June 16-19, 2019.*

**Nonlinear locally resonant metamaterials with emergent attenuation zone: a new design**[11] V. Zega, C. Comi, E. Bordiga, G. Langfelder, L. Falorni, A. Corigliano ‘

*Towards 3-axis FM MEMS gyroscopes: mechanical design and experimental validation*’ Transducers 2019 – Eurosensors XXXIII, Berlin, Germany, June 23-27, 2019.

[12] V. Zega , A. Frangi, G. Gattere, ‘

*Nonlinear Dynamics of MEMS resonators: numerical modelling and experiments*’ IEEE Sensors 2019, Montreal, Canada, October 27-30, 2019.

[13] V. Zega, A. Opreni, G. Mussi, H.-K. Kwon, G. Vukasin, G. Gattere, G. Langfelder, A. Frangi, T. W. Kenny,

*‘Thermal stability of DETF MEMS resonators: numerical modelling and experimental validation*’ IEEE MEMS2020, Vancouver, Canada, January 23-28, 2020.

[14] Z. Yao, V. Zega, Y. Su, A. Corigliano, ‘

*A metaplate in MEMS for innovative applications: vibration isolation and tunable mechanical filters*’ IEEE SENSORS 2020, online conference, October 25-28, 2020.

[15] V. Zega, C. Gazzola, A. Buffoli, M. Conti, L.G. Falorni, G. Langfelder, A. Frangi, ‘

*A defect-based MEMS phononic crystal slab waveguide*’, IEEE MEMS 2022, Tokyo, Japan, January 9-13, 2022.

[16] V. Zega, L. Gaffuri Pagani, M. Invernizzi, C. Credi, R. Suriano, R. Bernasconi, P. Carulli, A. Frangi, M. Levi, L. Magagnin, G. Langfelder, A. Corigliano, ‘

*‘ CIMTEC 2022, Perugia, Italy, June 20-29, 2022.*

**3D-printed and wet-metallization for sensors: a Coriolis mass flowmeter operating in the mode-split conditions**[Invited presentation]

[17] V. Zega, G. Gattere, M. Riani, F. Rizzini, A. Frangi, ‘

*High sensitivity MEMS z-axis accelerometer with in-planedifferential readout*’ IEEE MEMS 2023, Monaco, Germany, January 15-19, 2023.

[18] V. Zega, A. Frangi, G. Gattere, M. Riani, R. Nastri, G. Langfelder ‘

*A new high-sensitivity differential z-axis FM accelerometer*’ IEEE IFCS-EFTF 2023, Toyama, Japan, May 11-15, 2023.

[19] V. Zega, A. Opreni, Y. Banani, A. Buffoli, F. D. Mauri, G. Gattere, M. Riani, G. Langfelder, A. Frangi ‘

*’ Transducers 2023, Kyoto, Japan, June 25-29, 2023.*

**Design and experimental validation of new MEMS long-stroke actuator based on tunnel-comb fingers**________________________________________________________________________________________________________________________________________________

**FURTHER INTERNATIONAL CONFERENCES CONTRIBUTIONS**

[1] C. Comi, A. Corigliano, V. Zega and S. Zerbini ‘

*Optimal design and nonlinearities in a z-axis resonant accelerometer*’ Eurosime 2015, Budapest, Hungary, April 19-22, 2015.

[2] M. Bruggi, V. Zega, A. Corigliano ‘

*Optimization of auxetic structures for MEMS applications*’ Eurosime 2016, Montpellier, France, April 17-20, 2016.

[3] P. Minotti, G. Mussi, S. Dellea, A. Bonfanti, A.L. Lacaita, G. Langfelder, V. Zega, C. Comi, S. Facchinetti, A. Tocchio ‘

*A 160 µA, 8 mdps/Hz1/2 frequency-modulated MEMS gyroscope*’ Inertial ’17, Kauai, Hawaii, USA, March 27-30, 2017.

[4] G. Mussi, M. Bestetti, V. Zega, A. Frangi, G. Gattere, G. Langfelder ‘

*Resonators for real-time clocks based on epitaxial polysilicon process: a feasibility study on system-level compensation of temperature drifts*’ MEMS 2018, Belfast, Northern Ireland, January 21-25, 2018.

[5] P. Minotti, G. Mussi, G. Langfelder, V. Zega, S. Facchinetti, A. Tocchio ‘

*A system-level comparison of amplitude- vs frequency- modulation approaches exploited in low-power MEMS vibratory gyroscopes*’ Inertial ’18, Lake Como, Italy, March 26-29, 2018.

[6] V. Zega, C. Credi, M. Invernizzi, R. Bernasconi, G. Langfelder, A. Cigada, L. Magagnin, M. Levi and A. Corigliano ‘

*3D-printing and wet metallization for uniaxial and multi-axial accelerometers*’ Eurosime 2018, Toulouse, France, April 15-18, 2018.

[7] V. Zega, A. Nastro, L. D’Alessandro, M. Ferrari, R. Ardito, C. Valzasina, V. Ferrari and A. Corigliano ‘

*’ ESMC 2018, Bologna, Italy, July 2-6, 2018.*

**Design and experimental validation of an auxetic phononic crystal for industrial micro-systems**[8] G. Langfelder, P. Minotti, V. Zega, C. Comi, C. R. Marra, M. Leoncini, M. Bestetti ‘

*Frequency Modulated MEMS gyroscopes: recent developments, challenges and outlook*’ Transducers 2019 – Eurosensors XXXIII, Berlin, Germany, June 23-27, 2019.

[9] A. Bonanomi, E. Zappa, A. Cigada, V. Zega, A. Corigliano

*‘High speed vision system for the dynamic characterization of 3D printed sensors*’ Journal of Physics: Conference Series 1249(1), 012001, 2019.

[10] M. Bestetti, V. Zega, G. Langfelder, ‘

*Modeling and first characterization of broad-spectrum vibration rejection of frequency modulated gyroscopes*’, IEEE MEMS2020, Vancouver, Canada, January 23-28, 2020.

[11] G. Gobat, A. Frangi, V. Zega, ‘

*Interpolation based reduced order modelling for non-linearities in MEMS*’, IEEE SENSORS 2020, online conference, October 25-28, 2020.

[12] G. Gobat,

**V. Zega**

**,**P. Fedeli, L. G. Falorni, L. Guerinoni, C. Touzè, A. Frangi, ‘

*Experimental evidence of mechanical frequency comb in a quad-mass MEMS structure*’, IEEE MEMS 2021, online conference, January 25-29, 2021.

[13] M. Gianollo, V. Mastri, V. Zega, M. Bestetti, L. Falorni, G. Langfelder, ‘

*Miniaturized Quadruple Mass Gyroscopes: Challenges and Implementation*’, IEEE SENSORS 2021, online conference, October 31

^{st}– November 4

^{th}, 2021.

[14] V. Zega, A. Nastro, M. Ferrari, R. Ardito, V. Ferrari, A. Corigliano, ‘

*An innovative auxetic electrically-tunable MEMS mechanical filter*’, IEEE MEMS 2022, Tokyo, Japan, January 9-13, 2022.

[15] V. Zega, G. Gobat, P. Fedeli, P. Carulli, A. Frangi, ‘

*Reduced order modelling in a MEMS arch resonator exhibiting 1:2 internal resonance*’, IEEE MEMS 2022, Tokyo, Japan, January 9-13, 2022.

[16] G. Massimino, C. Gazzola, V. Zega, S. Adorno, A. Corigliano,

*‘Ultrasonic piezoelectric MEMS speakers for in-ear applications: bubbles-like and pistons-like innovative designs’,*EUROSIME22, Malta, April 25-27, 2022.

[17] V. Zega, M. Antonacci, A. Frangi, A. Corigliano, E. Riva ‘

*Planar GRIN lenses for MEMS energy harversters: a macroscale proof of concept*’ IEEE EFTF IFCS 2022, Paris, France, April 24-28, 2022.

[Finalist for the best student poster award]

[18] D. Faraci, A. Nastro, V. Zega, C. Comi ‘

*Two-scale asymptotic homogenization in a MEMS auxetic structure for over etch identification*’ ECCOMAS 2022, Oslo, Norway, June 5-9, 2022.

[19] C. Gazzola, V. Zega, G. Massimino, F. Cerini, S. Adorno, A. Frangi, A. Corigliano ‘

*’ ESCM 2022, Galway, Ireland, July 4-8, 2022.*

**Innovative Designs of Piezoelectric MEMS Speakers for In-Ear Applications**[20] V. Kouznetsova, P. Silva, V. Zega, M. Leamy, M. Geers ‘

**’ META2022, Torremolinos, Spain, July 19-22, 2022.**

*Emergent phenomena in locally resonant acoustic metamaterials due to subharmonic energy exchange*[21] P. Frigerio, A. Fagnani, V. Zega, G. Gattere, A. Frangi, G. Langfelder ‘

*On-MEMS-chip compact temperature sensor for large-volume, low-cost sensor calibration*’ IEEE MEMS 2023, Monaco, Germany, January 15-19, 2023.

[22] G. Gattere, V. Zega, M. Riani, F. Rizzini, F. Maspero, ‘

*’ Transducers 2023, Kyoto, Japan, June 25-29, 2023.*

**Design and validation of the first z-axis MEMS accelerometer with in-plane readout**[23] C. Gazzola, V. Zega, F. Cerini, S. Adorno, A. Corigliano, ‘

*’ Transducers 2023, Kyoto, Japan, June 25-29, 2023.*

**A mechanically-open and acoustically-closed piezoMEMS speaker for in-ear applications**[24] C. Gazzola, V. Zega, A. Corigliano, P. Lotton, M. Melon ‘

*, Forum Acusticum 2023, Torino, Italy, September 11-15, 2023.*

**Lumped-Parameters Equivalent Circuit for Piezoelectric MEMS Speakers Modeling**’[25] R. Ardito, C. Comi, V. Zega, A. Corigliano ‘

*Metamaterials and MEMS (MetaMEMS): a promising trend in Microsystems technology*’, 24

^{th}International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2023, Graz, Austria, April 16-19, 2023.

[26] O. M. O. Abdalla, R. Ardito, V. Zega, A. Corigliano ‘

*’ SMART 2023, Eccomas Procedia, 1586-1591, 2023.*

**Smart materials and metamaterials for MEMS: a growing trend in microsystems technology**________________________________________________________________________________________________________________________________________________

**PATENTS**

**[1] A. Tocchio, L. Falorni, C. Comi, V. Zega ‘**

*Frequency modulation MEMS triaxial gyroscope’*Patent n. US010520315B2 (December, 31

^{st}2019)

[2a] L. D’Alessandro, V. Zega, E. Riva, R. Ardito, F. Braghin, A. Corigliano ‘

*’ Deposited patent 102018000001510 (January 2018)*

**Dispositivo a modulo per l’isolamento vibro-acustico a bassa frequenza e ad ampio spettro, e relativa struttura periodica**[2b] L. D’Alessandro, V. Zega, E. Riva, R. Ardito, F. Braghin, A. Corigliano ‘

*’ Deposited patent WO 2019/141794A1 (July 2019)*

**Low-frequency and broad-speactrum vibro-acoustic insulating module device**[3a] Z. Yao, V. Zega, Y. Su, J. Zhang, A. Corigliano ‘

*Deposited patent 102020000012943 (May 2020)*

**Dispositivo MEMS con piastra d’isolamento vibrazioni**’[3b] Z. Yao, V. Zega, Y. Su, J. Zhang, A. Corigliano ‘

*Deposited patent PCT/EP2021/063865 (May 2021), published patent WO 2021/239715 (December, 2*

**MEMS device with vibration-insulating plate**’^{nd}2021).

[4a] V. Zega, G. Gattere, A. Frangi, A. Opreni, M. Riani ‘

*’ Deposited patent n. 102021000023795 (September, 15*

**Accelerometro risonante ad asse z con struttura di rilevamento avente prestazioni migliorate**^{th}2021)

[5a]

**V. Zega, C. Gazzola, L.G. Falorni, A. Frangi ‘**

*’ Deposited US patent (attorney docket No. 50650-01499) December 22*

**Defect-based MEMS Phononic Crystal slab waveguide**^{nd}2021

[6a] A. Opreni, V. Zega, A. Frangi, G. Gattere, M. Riani ‘

*’ Deposited patent 102022000002150 (February, 7*

**Long stroke MEMS actuator resilient to the pull-in and electronic system including the same**^{th}2022)

[7a] P. Chiariotti, V. Zega, A. Annessi, M. Martarelli, P. Castellini

*‘*Deposited patent 102022000015228 (July, 20

**Metastruttura con proprietà isolanti da vibrazioni**’^{th}2022)

[7b] P. Chiariotti, V. Zega, A. Annessi, M. Martarelli, P. Castellini

*‘*Deposited patent PCT/IB2023/057233 (July, 14

**Metastructure with vibration insulation properties**’^{th}2023)

[8a] T. Verdot, A. Buffoli, G. Langfelder, V. Zega ‘

**’ Deposited patent 22315317.2 (December, 8**

*Inertial sensor architecture with balanced sense mode andimproved immunity to quadrature effects*^{th}2022)