Nonlinear Dynamics in MEMS
Multiple sources of nonlinearities can be identified in MEMS when transformations are no-longer infinitesimal: geometric effects refer to the nonlinear evolution and coupling of stress components within a structure; electrostatics forces depend in an intrinsically nonlinear manner on geometrical gaps, just like gas dissipation. Analytical approaches for real MEMS often leads to results that are only qualitatively correct or need careful device dependent calibration. Numerical approaches are starting to emerge as a general solution, since MEMS might have complicated structures and features that can be hardly reduced to simple models. We propose fully predictive Model Order Reduction (MOR) techniques able to describe the nonlinear dynamics of complex MEMS without the need of experimental calibration of parameters.
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