Presenting the design and exprimental characterization of the new MEMS long- stroke actuator based on tunnel-comb fingers at the TRANSDUCERS2023 conference in Kyoto.
The work has been carried out within the joint research center STMicroelectronics and Politecnico di Milano.
Thanks a lot to my co-authors Andrea Opreni Yassine Banani Andrea Buffoli Flavia D. Mauri Gabriele Gattere Manuel Riani Giacomo Langfelder and Attilio Frangi.
[1] V. Zega, A. Opreni, Y. Banani, A. Buffoli, F. D. Mauri, G. Gattere, M. Riani,G. Langfleder, A. Frangi ‘Design and experimental validation of a new MEMS long-stroke actuator based on tunnel-comb fingers’ Transducers 2023, Kyoto, Japan, June 25-29, 2023