Design and Multi-physics simulation of innovative MEMS devices for new fabrication processes
The aim of the project is to design, fabricate and test innovative MEMS devices exploiting the new features of the recently developed STMicroelectronics fabrication process "Thelma-Double". The "Thelma-Double" thanks to its double layer of polysilicon is able to overcome the main limitations of the standard MEMS fabrication processes (i.e. planarity), thus opening the way to a new generation of MEMS devices. The scientific challenge is then twofold: to overcome the intrinsic planarity of MEMS devices exploiting the "Thelma-Double" features and obtain extraordinary performances not achievable so far through standard MEMS fabrication processes.